La_(0.5)Sr_(0.5)CoO_3薄膜的制备及其湿敏性质的研究  

Preparation and Humid Sensitivity Studies of La_(0.5)Sr_(0.5)CoO_3 Film

作　　者：王建禄[1] 彭巨擘[1] 蔡毅[2] 普朝光[2] 张鹏翔[1] 

机构地区：[1]昆明理工大学光电子材料研究所,云南昆明650031 [2]昆明物理所,云南昆明650223

出　　处：《昆明理工大学学报（理工版）》2006年第6期22-24,共3页Journal of Kunming University of Science and Technology(Natural Science Edition)

基　　金：云南省教育厅科学研究基金(项目编号:5y0663D)

摘　　要：利用脉冲激光沉积(PLD)的方法,在SiO2/Si衬底成功制备了钙钛矿结构的La0.5Sr0.5CoO3薄膜.对制备的薄膜生长的薄膜进行了XRD测量分析,并且对薄膜的表面形貌进行了测量分析.着重对薄膜的电阻进行了测量,发现环境气氛对电阻的影响,进而对薄膜湿敏电阻进行了测量.La0.5Sr0.5CoO3 films have been deposited on SiO2/Si subtracts successfully by the Pulse Laser Deposition. Then the XRD and SEM of La0.5Sr0.5CoO3 films have been measured and analyzed. In particular,measuring the resistance of the film reveals that the environment has influence on the resistance. So the humidity sensitivity resistance of the LSCO films is measured.

关 键 词：脉冲激光溅射沉积 镧锶钴氧薄膜 湿敏电阻 

分 类 号：TG132[一般工业技术—材料科学与工程]