采用TFA-MOD技术在LaAlO_3单晶基片上制备YBa_2Cu_3O_(7-x)涂层导体  

Fabrication of YBa_2Cu_3O_(7-x) Coated Conductor on LaAlO_3 Substrate by TFA-MOD Method

作　　者：黄万才[1] 古宏伟[1] 杨坚[1] 王连红[1] 

机构地区：[1]北京有色金属研究总院超导材料研究中心,北京100088

出　　处：《稀有金属》2006年第6期751-756,共6页Chinese Journal of Rare Metals

基　　金："863"计划项目(2002SAA306211;2004AA306130)资助项目

摘　　要：三氟乙酸盐-金属有机沉积技术(TFA-MOD)是制备钇钡铜氧涂层导体的有发展前景的方法之一。采用TFA-MOD技术在铝酸镧单晶基片上制备出YBa2Cu3O7-x涂层导体,并对不同烧结温度下制备的薄膜作了分析比较,找到了较为合适的烧结温度。用X射线衍射进行了物相的定性分析,由YBCO薄膜的(103)扫描图谱分析了薄膜的外延生长,用原子力显微镜观察了薄膜表面形貌。结果表明制备出的YBCO薄膜表面均匀致密、无明显裂纹、有较强的(00l)衍射峰。The metal organic deposition （MOD） of YBa2Cu3OT7-x（ YBCO ） using metal trifluoroacetate （TFA） precursor is considered to be a strong candidate as a low-cost fabrication process in coated conductors. YBCO was fabricated on LAO （001） substrate by TFA-MOD, and to find the best sintering temperature, YBCO films fabricated at different sintering temperatures were compared. Crystal phase in the film was detected by X-ray diffraction （XRD）. The microstructure of the YBCO was characterized by AFM. The results show that YBCO films on LAO substrate with the c-axis grain orientation, dense surface and no crack are obtained.

关 键 词：TFA-MOD 钇钡铜氧 涂层导体 

分 类 号：TM26[一般工业技术—材料科学与工程]