电容式Lamb波器件的信号接收方法  

Signal reception method of capacitive Lamb wave device

作　　者：胡友旺[1] 贾宏光[1] 李锋[1] 张平[1] 王淑荣[1] 吴一辉[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《光学精密工程》2007年第1期76-83,共8页Optics and Precision Engineering

基　　金：国家863计划项目(No.2004AA404250);国家自然科学基金项目(No.60474055)

摘　　要：提出了激励和接收均使用电容式叉指换能器(Capacitive Interdigital Transducers,CIDT)的集成化的电容式Lamb波器件。利用电容式叉指换能器直接激励和接收Lamb波非对称模式的方式,解决了机电耦合效率的问题。在分析各种电容检测电路的基础上,针对Lamb波电容式检测的特殊性,选择了直流电路法来进行接收电容变化规律的测量。为说明直流电路法的适用性,设计了波动检测验证实验。实验结果表明:用直流电路法测量得到的声波信号与其理论计算值之间误差仅为2.4%,证明了直流电路法的适用性,解决了目前Lamb波器件的功能材料层的制作工艺均与传统集成电路工艺不兼容的问题。A Capactive Interdigital Transducer（CIDT） was used in capacitive Lamb wave device to solve the problem that the processes of function layers in most Lamb wave devices were incompatible with classical IC process. In the devices, CIDT were used as both excitation cell and reception cell of Lamb wave, as it was possible to realize the miniaturization. Because of CIDT＇s exciting and receiving the anti-symmetrical modes of Lamb wave directly, the problem of energy-coupling efficiency of transducers was solved. Basing on the analysis of several capacitance detecting circuits, the direct current circuit method was selected to meet the special demands of the device. In order to validate the application feasibility of direct current circuit method, a vibration-detecting experiment was designed. Experimental results show that the error between measurement vibration signal and its theory value is only 2.4%.

关 键 词：电容式Lamb波器件 电容式叉指换能器 集成电路工艺兼容 电容式接收 直流电路法 

分 类 号：TP212.16[自动化与计算机技术—检测技术与自动化装置]