氧化铟纳米材料的水热合成、结构表征及其气敏性能研究  

Characterization and Gas Sensing Properties of Nanocrystalline Indium Oxide Prepared by a Hydrothermal Process

作　　者：徐甲强[1] 王晓华[1] 王国庆[1] 王焕新[1] 

机构地区：[1]郑州轻工业学院材料与化工学院,郑州450002

出　　处：《传感技术学报》2007年第1期22-27,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(20471055);河南省杰出青年科学基金(03120000800)

摘　　要：通过水热法制备了立方结构纳米In2O3的前驱体In(OH)3,研究了煅烧温度对颗粒尺寸和分散性的影响.前躯体In(OH)3和In2O3的结构、形貌以及组成分别由XRD、TEM、TPD、TG-DSC和XPS表征.结果表明,600℃煅烧可以得到50-80nm立方形的纳米In2O3,颗粒大小均匀、分散性好.随着煅烧温度的升高,纳米In2O3的平均粒径逐渐增大,分散性能下降;XPS元素分析表明,由于吸附氧的存在,合成的纳米In2O3与化学计量比存在偏差;氧化铟表面存在着四种类型的O,和In2O3对氧气的程序控温脱附结果一致.用静态配气法测试了元件的气敏性能,结果表明煅烧温度为600℃时气敏性能最好;通过和化学沉淀法制备的样品进行对比,发现水热法合成的样品具有更好的灵敏度和选择性.The precursor of In2O3, In（OH）3 was prepared by a hydrothermal process. The effects of sintering temperature on average particle size and dispersivity of In2O3 were studied. The crystal structure, morphology, components of the precursor and In2O3 nanocrystalline were characterized by XRD, TEM, TPD, TG-DSC and XPS. The results showed that uniform In2O3 cubes with range size of 50-80 nm and fine dispersivity can be obtained after sintered the precursor at 600℃. The mean particle size of In2O3 nanocrystalline increased with the increasing of sintering temperature, while dispersivity decreased; XPS results indicated that the sample had a departure to stoichiometric In2O3 that was reduced by absorbed oxygen, the results were accorded with O2-TPD of In2O3. Gas sensing properties of the sensors were tested in static state. The results showed that the sensors annealed at 600℃ had the best sensing behavior. Compared with the sensors made from indium oxide nanopowder prepared by chemical precipitation, the sensor made from the hydrothermal process showed better sensing properties.

关 键 词：水热合成 纳米氧化铟 气敏元件 表面分析 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置] TQ174.758[自动化与计算机技术—控制科学与工程]