Temperature measurement based on radialization power for micro-hotplate  

作　　者：张彤 漆奇 刘奎学 刘丽 张蕾 徐宝琨 

机构地区：[1]College of Electronic Science and EngineeringJilin University, Changchun 130012, China

出　　处：《中国有色金属学会会刊：英文版》2006年第B02期780-784,共5页Transactions of Nonferrous Metals Society of China

基　　金：Project (60104006) supported by the National Natural Science Foundation of China Project(20030322) supported by the Science Technology Office of Jilin Province

摘　　要：A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis （FEA） software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.

关 键 词：气体传感器 微型热盘 辐射功率 温度测量 热分布 

分 类 号：TH811[机械工程—仪器科学与技术]