A Hybrid Silicon-PDMS Micropump Actuated by PZT Bimorph  

作　　者：Haining Wang Dafu Cui Zhaoxin Geng Xing Chen 

机构地区：[1]State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, Beijing 100080, China

出　　处：《稀有金属材料与工程》2006年第A03期319-320,共2页Rare Metal Materials and Engineering

基　　金：The authors greatly acknowledge the financial support from the National Science Foundation of China （Grant number 20299030, 60427001 and 60501020）.

摘　　要：The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber,two passive valves and one PDMS diaphragm.A PZT bimorph working as the actuator is mounted on the PDMS diaphragm.The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm,making the micropump more efficient and easier to be fabricated.The flow rate of the micropump is a function to the voltage and frequency of the applied square wave.When a square wave of 100V is applied,a maximum flow rate of 317μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.The fabrication and characterization of a hybrid Silicon-PDMS micropump based on MEMS technology is presented. The micropump consists of one chamber, two passive valves and one PDMS diaphragm. A PZT bimorph working as the actuator is mounted on the PDMS diaphragm. The use of the PDMS diaphragm and the PZT bimorph can give rise to large displacements of the pump diaphragm, making the micropump more efficient and easier to be fabricated. The flow rate of the micropump is a function to the voltage and frequency of the applied square wave. When a square wave of 100V is applied, a maximum flow rate of 317 μL/min and a back-pressure of 2 kPa are achieved at 20 Hz.

关 键 词：MICROPUMP PZT bimorph PDMS 

分 类 号：TG[金属学及工艺]