Dielectric Properties of Capacitive-Type Humidity Sensor Made under Different Pressures  

作　　者：Jing Wang Xiao-hua Wang 

机构地区：[1]School of Electron and Information Engineering, Dalian University of Technology, Dalian 116023, China [2]Department of Computer Science and Information, Shanghai University of Electric Power, Shanghai 200090, China

出　　处：《稀有金属材料与工程》2006年第A03期366-368,共3页Rare Metal Materials and Engineering

基　　金：The project is supported by the National Natural Science Foundation of China （60074031, 60474052）.

摘　　要：Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative humidity range of 10%～98%,indicating high humidity sensitivity of the sensors.At a certain measuring frequency,the capacitance of the sensors increases as increasing of the preparation pressure,while the sensitivity of the sensors basically remains the same.The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity.At a certain humidity,the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.Capacitive humidity sensors were made of nanometer barium titanate. The pellets were prepared under different pressures between 3920N to 7850N force. The capacitance changes in three orders of magnitude in the relative humidity range of 10% - 98%, indicating high humidity sensitivity of the sensors. At a certain measuring frequency, the capacitance of the sensors increases as increasing of the preparation pressure, while the sensitivity of the sensors basically remains the same. The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity. At a certain humidity, the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.

关 键 词：humidity sensor capacitive-type preparation pressure humidity sensing property 

分 类 号：TG[金属学及工艺]