Fabrication of SAW Sensor for Detecting Chemical Agent  

作　　者：J H Lee B S Joo J S Huh D D Lee 

机构地区：[1]School of Electronic & Electrical Engineering,Kyungpook National University,Korea [2]Dept.of Materials Science and Metallurgy,Kyungpook National University,Korea

出　　处：《稀有金属材料与工程》2006年第A03期433-435,共3页Rare Metal Materials and Engineering

摘　　要：SAW sensors using five different types of polymer to detect of chemical agents(DMMP,CH_3CN,CH_2Cl_2,DCP) have been fabricated and its gas response characteristics were extensively investigated.The polymers used as the sensing material are polyisobutylene(PIB),polyepichlorohydrin(PECH),polydimethylsiloxane(PDMS),polyisoprene(PIP)and polybutadiene(PBD).Their thin films were coated on quartz substrate by spin coating technique.Three types of simulants gases,dimethylmethylphosphonate(DMMP),acetonitrile(CH_3CN)and dichloromethane(CH_2Cl_2),dichloropentane(DCP)were used as target gases,instead of the real nerve,blood,choking and vesicant agents.After spin coating of PIB and PECH,the substrates were heated to 65℃with N_2 flow for 1 h to remove the cyclohexane and ethylacetate which was used as solvent. PDMS was heated to 75℃with N_2 flow for 2 h to remove the ethylacetate which was used as solvent.PBD and PIP on the substrate were heated to 60℃with N_2 flow for 1 h to remove the benzen which was used as solvent.The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.SAW sensors using five different types of polymer to detect of chemical agents （DMMP, CH3CN, CH2Cl2, DCP） have been fabricated and its gas response characteristics were extensively investigated. The polymers used as the sensing material are polyisobutylcne （PIB）, polyepichlorohydrin （PECH）, polydimethylsiloxane （PDMS）, polyisoprene（PIP） and polybutadicnc（PBD）. Their thin films were coated on quartz substrate by spin coating technique. Three types of simulants gases, dimcthylmethylphosphonate（DMMP）, acetonitrile （CH3CN） and dichloromcthane（CH2Cl2）, dichloropentane（DCP） were used as target gases, instead of the real nerve, blood, choking and vesicant agents. After spin coating of PIB and PECH, the substrates were heated to 65℃ with N2 flow for 1 h to remove the cyclohexane and ethylacetate which was used as solvent. PDMS was heated to 75℃ with N2 flow for 2 h to remove the ethylacetate which was used as solvent. PBD and PIP on the substrate were heated to 60℃ with N2 flow for 1 h to remove the benzen which was used as solvent. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.

关 键 词：SAW DMMP CH3CN CH2CL2 DCP polymer film 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]