MEMS-based ZnO Piezoelectric Tactile Sensor for Minimally Invasive Surgery  

作　　者：Minrui Wang Jing Wang Yan Cui Liding Wang 

机构地区：[1]MST Research Center, Dalian University of Technology, Dalian 116023, China [2]Department of Electronic Engineering, Dalian University of Technology, Dalian 116023, China

出　　处：《稀有金属材料与工程》2006年第A03期436-438,共3页Rare Metal Materials and Engineering

基　　金：supported by National Natural Science Foundation of China(No.90207003)

摘　　要：This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor,which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS).The sensor includes a silicon substrate, platinum bottom electrode,platinum top electrode,and a ZnO piezoelectric thin film,which is sandwiched between the two-electrode layers.The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7pc/uN.The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time,and manipulating the tissue safely.This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery （MIS）. The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.

关 键 词：tactile sensor PIEZOELECTRIC edoscopic grasper 

分 类 号：TG[金属学及工艺]