A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self  

作　　者：Fuxue Zhang Xu Mao Yu Liu Nan Zhang Wei Zhang 

机构地区：[1]Sensor Research Center, Beijing Information Technology Institute, Beijing 100101, China

出　　处：《稀有金属材料与工程》2006年第A03期519-521,共3页Rare Metal Materials and Engineering

基　　金：supported by the National Natural Science Foundation of China(No.60272001);the Beijing Natural Science Foundation of China(No.4032010).

摘　　要：This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier＇s angular velocity, the silicon was manufactured by anisotropy etching. The design, fabrication and packing of the sensing element were introduced in the paper. The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier, and the angular velocity of the rotating carrier itself.

关 键 词：rotating carrier MICROMACHINE GYROSCOPE angular velocity 

分 类 号：TG[金属学及工艺]