A Novel Integrated PZT-Driven Micropump and Microvalve  

作　　者：Zhaoxin Geng Dafu Cui Haining Wang Changchun Liu Bo Su 

机构地区：[1]State Key Lab. of Transducer Tech., Inst. of Electronics, Chinese Academy of Sciences, Beijing 100080, China

出　　处：《稀有金属材料与工程》2006年第A03期540-542,共3页Rare Metal Materials and Engineering

基　　金：the financial support from the National Science Foundation of China(Grant No.20299030,60427001 and 60501020).

摘　　要：According to the'elastic buffer mechanism'and the'variable gap mechanism',a new device,which is both micropump and active microvalve actuated by PZT bimorph cantilever,was fabricated with polydimethyisiloxane (PDMS) and silicon chip.The thickness of the micropump membrance is about 180μm.The diameter and the depth of micropump chamber cavity are 6 mm and 40μm,respectively.The performances of the micropump,such as pump rate and backpressure,were characterized.As a flow-rectifying element,the diffusers and active valve were used instead of passive check valves.The flow rate and the backpressure of the micropump are about 420μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.According to the ＇elastic buffer mechanism＇ and the ＇variable gap mechanism＇, a new device, which is both micropump and active microvalve actuated by PZT bimorph cantilever, was fabricated with polydimethylsiloxane （PDMS） and silicon chip. The thickness of the micropump membrance is about 180 μm. The diameter and the depth of micropump chamber cavity are 6 mm and 40 μm, respectively. The performances of the micropump, such as pump rate and backpressure, were characterized. As a flow-rectifying element, the diffusers and active valve were used instead of passive check valves. The flow rate and the backpressure of the micropump are about 420 μL/min and 2 kPa when applying a 100 V square wave driving voltage at frequency of 35 Hz.

关 键 词：MICROPUMP MICROVALVE PZT PDMS 

分 类 号：TG[金属学及工艺]