环境扫描电镜中电荷环境的测量  

Evaluation of Charged Environments in Environment Scanning Electron Microscope

作　　者：付景永[1] 吉元[1] 张隐奇[1] 王丽[1] 田彦宝[1] 徐学东[1] 韩晓东[1] 

机构地区：[1]北京工业大学固体微结构与性能研究所,北京100022

出　　处：《真空科学与技术学报》2007年第1期72-75,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金资助项目(No.60171024);北京教委资助项目(No.200610005030)

摘　　要：在环境扫描电镜(ESEM)中,采用高灵敏度的pA-表测试系统,测量法拉第杯,以及Cu-Zn合金、单晶Si、单晶Al2O3三种样品的样品电流(ISP)。ISP值反映出由电子流和离子流控制的ESEM样品室内的电荷环境。法拉第杯的ISP反映出入射电子和离子所控制的电荷环境;样品的ISP反映出入射电子、信号电子和离子所控制的电荷环境。由ISP值可确定ESEM在不同操作和环境条件下的离子化效率、离子化饱和程度,以及气体分子的散射作用。The environment scanning electron microscope（ESEM） was modified, with a highly sensitive picoameter installed, to measure the current, Isp, of a Farad-cup and various samples,such as Cu-Zn alloy,Si and Al2O3. lsp was found to closely correlates to the charged state of the sample. ISp of charged Farad-cup originates from impinging of primary electrons and ions; whereas Isp of the charged sample results from primary electrons, signal electrons and ions. Moreover, lsp also provides interesting information related to ESEM, including ionization effcient and saturation, dectron scattering by gas molecules under different operating conditions.

关 键 词：环境扫描电镜 电荷环境 样品电流 

分 类 号：TB717[一般工业技术—真空技术] TB771