电真空器件残气质谱分析和贮存寿命的快速测试研究  

Mass Spectroscopy Study of Residual Gases in Vacuum Electronic Devices and Its Storage Lifetime

作　　者：崔云康[1] 张晓兵[1] 雷威[1] 肖梅[1] 狄云松[1] 王金婵[1] 毛福明[1] 

机构地区：[1]东南大学电子科学与工程学院

出　　处：《真空科学与技术学报》2007年第1期80-83,共4页Chinese Journal of Vacuum Science and Technology

基　　金：国家973计划(No.2003CB314706No.2003CB314702);教育部博士点基金(No.20030286003);新世纪优秀人才支持计划(No.NCET-04-0473No.NCET-05-0466)

摘　　要：电真空器件内的残气压强是制管和管子工作过程中管内吸气剂材料吸气后形成的平衡压强,器件击破后质谱分析室本底气体会被吸气剂吸收。因质谱分析室放出的本底气体量一般远小于吸气剂在器件内原吸收的气体量,故器件内的残气压强的新平衡值增量可以忽略,分析室本底不会影响正确的分析结果;大气漏入管内后只表现出该管内惰性气体氩的积累;据此,我们提出了充氩法贮存寿命的快速测试方法。只有吸气剂失效或吸气饱和后管内残气质谱图才反映出漏入的大气成份或分析室本底气体干扰的特征。A novel technique was developed for fast testing the storage lifetime of vacuum electronic devices with getter inside by mass spectroscopy. Filling in argon at atmospheric pressure for the vacuum electronic device is the main idea. Residual gases in the devices were studied with quadruple mass spectroscopy（QMS）. We found that the residual gases background in the vacuum chamber and the getter of the device little affect the test.

关 键 词：电真空器件 残余气体 质谱分析 特性 

分 类 号：TN107[电子电信—物理电子学]