PMMA微流控芯片微通道尺寸的检测  

Measurement of microchannels of PMMA microfluic chip

作　　者：文伟力[1] 左春柽[1] 于建群[2] 张学军[1] 刘庆民[1] 陈向伟[1] 刘岩[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130022 [2]吉林大学生物与农业工程学院,吉林长春130022

出　　处：《光学精密工程》2007年第2期212-218,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.10572053);高等学校博士学科点专项基金(No.20040183057);吉林省科技发展计划资助项目(No.20020610)

摘　　要：研究了一种基于光电耦合器件(CCD)及图像处理技术的聚甲基丙烯酸甲酯(PMMA)微流控芯片微通道几何尺寸的测量系统,论述了该系统的关键技术及其实现方法,包括图像的预处理、二值化、轮廓提取以及微通道尺寸的测量等。利用该系统测量的微通道几何尺寸(1-1 000μm)与轮廓仪和万能工具显微镜的测量结果吻合很好,最大测量误差为2μm(半深宽度),分析了测量误差产生的原因。检测实验结果表明:该检测方法提供的微通道几何尺寸评定正确可行、通用性好、应用简便,还可以避免轮廓仪在深结构测量中的误差。Based on CCD-image and image processing technology, a measuring system for microchannel＇s sizes was developed. The non-contact measuring method for geometrical sizes was presented by means of the digital image manipulation technology, including image preprocessing, image binary-conversion, boundary encoding and calculation of microchannel＇s geometrical sizes, etc. The measured results show that the maximum measuring error by proposed method is 2 μm,which accords with the results measured by a stylus profiler and a universal measuring microscope. The reasons to cause the error were analyzed, results indicate errors often made by stylus in that this method is correct, feasible, simple to use, and can avoid the deeper structures.

关 键 词：微流控芯片 微细加工 CCD图像检测 尺寸测量 图像处理 二次标定 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术] TB92[自动化与计算机技术—计算机科学与技术]