扫描电—声显微镜及其应用  

Scanning Electron Acoustic Microscope and Applications

作　　者：殷庆瑞[1] 唐振[1] 张惠静[1] 江福民[1] 王通[1] 王惠芳 丁积祥 梁坚 韦建勇 朱祖福 

机构地区：[1]中国科学院上海硅酸盐研究所 [2]上海市电子光学技术研究所

出　　处：《电子显微学报》1990年第4期53-61,共9页Journal of Chinese Electron Microscopy Society

摘　　要：扫描电—声显微镜最近已在我们实验室研究制成功了,它是国际上近几年来发展起来的一种新的成像工具,它的成像机理是基于试样的微观热学和弹性性质的变化,特别是它具有非破坏性的亚表面剖面成像能力,这是常规扫描电镜所无法比拟的。本文主要介绍了扫描电一声显微镜的发展,工作原理,电—声成像的物理过程和优点。并显示了半导体材料、集成电路、金刚石复合片、硅片表面离子注入以及金属等试样的表面和亚表面电—声像,并与二次电子像作了比较,显示了电—声像的某些特点和潜在的应用价值。Scanning Electron Acoustic Microscopy (SEAM) has been made in our laboratory re-cently, which is a new technique for imaging and characterization of thermal and elastic pro-perty variations on a micron-scale resolution. The development of SEAM, physical process and advantages of electron acoustic imaging and principle of operation are described in this paper. Some pictures for different samples, semiconductor and I.C. device, poly crystal dia-mond composite, matel, ion,implantation on the surface of a wafer and so on were shown with SEAM and conventional SEM. The results show that SEAM has its own features over SEM and potential applications.

关 键 词：扫描 电-声显微镜 显微镜 

分 类 号：TN16[电子电信—物理电子学]