用于真空微波器件的热阴极曲率半径测试研究  

Measurement of the Curvature Radius for the Thermal Cathode Used in Vacuum Microwave Devices

作　　者：刘燕文[1] 田宏[1] 张明晨[1] 李玉涛[1] 邹涛[1] 刘胜英[1] 董芳[1] 张洪来[1] 

机构地区：[1]中国科学院电子学研究所,北京100080

出　　处：《真空电子技术》2006年第6期29-30,34,共3页Vacuum Electronics

摘　　要：对阴极曲率半径的测试方法及曲率半径误差的产生原因进行了分析,利用NikonMM-40型测量显微镜对阴极的弧度进行了测试,并对显微镜的测量误差进行了分析,给出了精确测量阴极弧度的方法。An optical method for measuring the curvature radius of the cathode surface is presented. The optical principle of the method is analyzed and many measuring factors which affect the absolute error are analyzed. Then the curvature radius of cathode are measured by using Nikon MM-40 microscope. At last, a simple method with high measuring accuracy is given.

关 键 词：光学方法 曲率半径 误差 测量精度 

分 类 号：O462[理学—电子物理学]