Acid etching process for fabrication of Bi_2Sr_2CaCu_2O_(8+x) stack  

作　　者：ZHANG Jie CHEN Jian WU JingBo KANG Lin XU WeiWei WU PeiHeng 

机构地区：[1]Research Institute of Superconductor Electronics, Nanjing University, Nanjing 210093, China

出　　处：《Chinese Science Bulletin》2007年第3期303-306,共4页

基　　金：the National Natural Science Foundation of China (Grants Nos.10474036, 60571007 and 10390163);the National Basic Research Program of China (Grant No. 2006CB601006);the Specialized Research Fund for the Doc-toral Program of Higher Education of China (Grant No. 2004028033)

摘　　要：We adopted a new method, acid etching process, to fabricate the intrinsic Josephson junctions based on the Bi2Sr2CaCu2O8+x single crystals. By soaking the crystals into the dilute hydrochloric acid, we fabricated a junction stack successfully, and meantime made the surrounding area insulated. A certain concentration of hydrochloric acid was used to maintain the roughness of the modified layer. The cur-rent-voltage characteristic was achieved through the four terminal measurement. We could control the junctions' number by changing the concentration and the soaking time. We also found that the thick-ness of the stack was equal to the average height of the insulation layer. Such a simple, convenient and controllable fabrication method with a high yield might widen the applications of the intrinsic Joseph-son junctions.We adopted a new method, acid etching process, to fabricate the intrinsic Josephson junctions based on the Bi2Sr2CaCu2O8＋x single crystals. By soaking the crystals into the dilute hydrochloric acid, we fabricated a junction stack successfully, and meantime made the surrounding area insulated. A certain concentration of hydrochloric acid was used to maintain the roughness of the modified layer. The current-voltage characteristic was achieved through the four terminal measurement. We could control the Junctions＇ number by changing the concentration and the soaking time. We also found that the thickness of the stack was equal to the average height of the insulation layer. Such a simple, convenient and controllable fabrication method with a high yield might widen the applications of the intrinsic Josephson junctions.

关 键 词：本征约瑟夫森结 Bi2Sr2CaCu2O8+x叠片 制造 酸蚀刻工艺 

分 类 号：TN305.7[电子电信—物理电子学]