高精度STM.IPC-205BJ型原子力显微镜的设计  

DESIGN OF HIGH RESOLVING CAPABILITY STM.IPC-205BJ TYPE ATOMIC FORCE MICROSCOPE

作　　者：彭光含[1] 杨学恒[2] 辛洪政[2] 刘济春[2] 李旭[2] 

机构地区：[1]重庆大学自动化学院 [2]重庆大学数理学院,重庆400030

出　　处：《机械工程学报》2007年第2期127-131,共5页Journal of Mechanical Engineering

基　　金：国家自然科学基金(59775069);湖南省教育厅(06C606);湖南文理学院自然科学基金(JJQD05051)资助项目

摘　　要：在成功研制高精度IPC-205B型STM基础上对硬件设计和软件配备进行改进,研制开发了更高精度和应用更广的原子力显微镜。阐述该原子力显微镜的工作原理、组成及应用,详细介绍镜体的独特设计与控制过程、微悬臂的制作与工作过程。该样机采用简单适用的新型微悬臂,利用扫描隧道显微镜检测微悬臂的起伏,通过四维机械驱动和双压电陶瓷扫描,能够有效提高扫描精度、扩大扫描范围。该原子力显微镜的分辨力为:横向0．1nm,纵向0．01 nm。给出该机型检测的几种样品的扫描图像。Based on a high resolving capability scanning tunneling microscope and development on hardware and software design, a new-style higher resolving capability and more useful AFM is developed. The principles of operation, components and some applications of the AFM system is resported. And the special design of the lens body and control process and the manufacture and work process of cantilever are introduced in detail. The AFM adopted a new simple and useful cantilever. This model uses an STM to detect the shift of the cantilever and uses four motors and two PZT tubes to enlarge the scanning rage and to enhance the resolution effectively. The AFM＇s resolving capability is as follows： transverse： 0.1 nm, vertical： 0.01 nm. Several images given as samples are obtained with the model.

关 键 词：原子力显微镜 镜体 微悬臂 硬件设计 

分 类 号：O562.2[理学—原子与分子物理]