调制周期对TaN/NbN纳米多层膜力学性能的影响  

Influence of Modulation Period on Mechanical Property of Nanoscale TaN/NbN Multilayered Coatings

作　　者：张学华[1] 曹猛[1] 王明霞[1] 刘桐[1] 李德军[1] 

机构地区：[1]天津师范大学物理与电子信息学院,天津300074

出　　处：《金属功能材料》2007年第1期23-26,共4页Metallic Functional Materials

基　　金：天津市应用基础研究重点项目(043801011);国家自然科学基金(50472026)

摘　　要：本研究选择钽和铌的氮化物作为个体层材料,利用FJL560CI2型超高真空射频磁控与离子束联合溅射系统制备TaN、NbN及一系列的TaN/NbN多层薄膜。通过XRD和纳米力学测试系统以及摩擦磨损仪分析了该体系合成以后的晶体结构,以及调制周期对机械性能的影响。结果表明:多层膜的纳米硬度值普遍高于两种个体材料混合相的硬度值;当调制周期为8.5 nm时,TaN/NbN多层膜达到最大硬度30 GPa,结晶出现多元化,多层膜体系的硬度、应力、弹性模量以及膜-基结合性能均达到最佳效果。This paper reported the deposition of TaN/NbN multilayered coatings with nanoscale bilayer period using FJL560CI2 ultra-high vacuum radio freqency magnetron sputter chamber. XRD, nano indenter and profiler were employed to investigate the influence of the modulation period on microstructure, mechanical properties of the coatings, The results show that all multilayered coatings almost reveal higher nanohardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. When the modulation period is 8.5 nm, the hardness of TaN/NbN multilyered coating gets the highest value which is 30 GPa, The multilayered coating at this condition possessed excellent hardness, residual stress, elastic modulus and fracture resistance, compared to ones synthesized at other modulation period.

关 键 词：射频磁控溅射 TaN/NbN多层膜 调制周期 硬度 

分 类 号：TB383.1[一般工业技术—材料科学与工程]