微米级电化学加工关键技术研究  

Investigation on Key Techniques of Electrochemical Micro-machining

作　　者：张朝阳[1] 朱荻[1] 曲宁松[1] 王明环[1] 

机构地区：[1]南京航空航天大学,南京210016

出　　处：《中国机械工程》2007年第4期403-406,共4页China Mechanical Engineering

基　　金：航空科学基金资助项目(04H52055);南京航空航天大学博士学位论文创新与创优基金资助项目(BCXJ04-09)

摘　　要：针对微米级电化学加工的关键技术问题,研制了用于微米级电化学加工的纳秒脉冲电源,并利用电化学腐蚀方法,在自制的电化学加工机床上连续实现了微细工具电极的制作和工件的加工。基于试验提出了微细电化学加工间隙的检测控制方法,提高了加工过程的稳定性,增强了定域蚀除能力。在低浓度酸性电解液中实现了微米级的电化学加工,利用研制的纳秒脉冲电源,根据加工电流将极间间隙控制在5μm左右,加工出了“NUAA”字形,每个字母高90μm,宽60μm,字母线条的宽度只有20μm。The key techniques and realization approach of electrochemical micro-machining （EMM） were studied. Ultra-short pulse power source for the requirements of EMM was designed and fabricated. On the self-developed equipment, tool electrode and workpiece were sequentially machined with electrochemical method. The real-time monitoring and control of the electrochemical machining gap were presented in order to improve the localization and the stability of machining process. So micrometer precision of ECM is achieved in the low concentration acid electrolyte. Inter-electrode gap is controlled to about 5μm on the basis of the machining current. Four letters of ＂NUAA＂ are made by the nanosecond pulse power source. The size of each letter is 60μm in width,90μm in height, the lines of letters are 20μm in width.

关 键 词：微细电化学加工 超短脉冲电源 工具电极 加工间隙 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]