外腔半导体激光器在微振动测量中的应用  

Applications of External-Cavity Semiconductor Laser in Microvibration Measurement

作　　者：江鹏飞[1] 谢福增[1] 

机构地区：[1]中国科学院半导体研究所,北京100083

出　　处：《中北大学学报（自然科学版）》2007年第1期46-48,共3页Journal of North University of China(Natural Science Edition)

摘　　要：基于外腔半导体激光器(ECSL)良好的相干特性,采用Littrow自准直外腔方式进行了实验,得到了良好的线宽和稳定的功率,验证了外腔半导体激光器运用于纳米级光学测量和微振动测量的可行性;提出了解决外界扰动的反馈光路方案,能够有效滤除环境振动和噪声干扰,提高了振动测量系统在现实环境中的适应能力.Based on excellent coherence of the External-Cavity Semiconductor Laser （EGSL）, the experiment of favorable spectral line width and steady power were got by using autocollimation external-cavity of Littrow. It is proved that ECSL can be used in the measurement of nanometrology and microvibration. A method of feedback light-path to remove presented, which can improve the adaptability of the environment vibratility and noise interference was the measurement system in the environment.

关 键 词：微振动测量 反馈控制 外腔半导体激光器 窄线宽 

分 类 号：TH774.3[机械工程—仪器科学与技术]