中等电压透射电镜的球差矫正  

Correction of spherical aberration of a medium voltage TEM

作　　者：陈文雄[1] 徐军[1] 陈莉[1] 张会珍[1] 

机构地区：[1]北京大学物理学院电镜室,北京100871

出　　处：《电子显微学报》2007年第1期1-7,共7页Journal of Chinese Electron Microscopy Society

摘　　要：20世纪末中等电压透射电镜的物镜球差矫正获得成功,这是上世纪80年代世界第一台电子显微镜创制者获得诺贝尔物理奖以来电镜发展史上迄今取得的最重大成就。本文简要回顾了球差矫正研究的历史,重点介绍Scherzer,Rose,Haider等关于球差矫正的观点、理论和实验研究所取得的成果,详细讨论了六极消球差系统的工作原理以及对中合轴的原理和方法。In last decade of 20^th century, the success in the research field of correction of the spherical aberration of a medium voltage TEM is the greatest achievement since the invention of TEM in 1932. In this paper,we recall briefly the history of correction of spherical aberration in TEM,with stress on introduction of the view points, theory, and experiments of Scherzer, Rose, Haider, et al. in this research field. The principle and method of hexapole aplanatie lens system and alignment have been discussed in detail.

关 键 词：像差矫正 6极消球差(8f)系统 衍射图表 点扩展函数 信息极限 中等电压高分辨TEM 

分 类 号：TN16[电子电信—物理电子学]