新型激光驱动可变形反射镜的模型、研制及特性  

Modeling,Fabrication,and Characterization of a Novel Optically Driven Deformable Mirror

作　　者：向东[1] 王青玲[2] 张光勇[3] 周丽娜[1] 

机构地区：[1]中国地质大学数学与物理学院 [2]中国地质大学地球物理与空间信息学院,武汉430074 [3]华中科技大学激光国家重点实验室,武汉430074

出　　处：《Journal of Semiconductors》2007年第2期269-274,共6页半导体学报（英文版）

基　　金：总装备部预研基金资助项目(批准号:41321030202)~~

摘　　要：介绍了一种新型的利用激光驱动的可变形反射镜.它包括三个部分:以聚脂薄膜为主体做成的2μm厚的镜面,支撑镜面的6μm高栅格状的支撑柱,由光敏材料砷化镓(GaAs)构成的感光底层.同时在镜面与感光底层之间施加偏置的高频交流电压.当感光底层背面被激光照亮时,GaAs中载流子的变化导致镜面与感光底层之间电阻的重新分布,从而镜面与感光底层之间电压发生变化,因此在静电力的作用下镜面将会发生相应的形变.文中分析了此反射镜工作的理论模型,介绍了此装置的制作工艺,并通过实验验证了偏置电压幅值、交流电压频率等参数对可变形反射镜性能的影响.This paper presents a novel deformable mirror driven by a laser. The mirror is composed a 2mm-thick polymeric membrane mirror supported by a 6mm-thick grid of patterned photoresist and a photoconductive GaAs substrate. A very high-frequency AC bias is applied between the membrane and the photoconductive substrate. When the back of the device is illuminated by a laser,the carrier concentration in the GaAs increases. This causes an impedance redistribution between two cascaded impedances, and then the membrane is deformed because of the static electric effect. The working model of the mir- ror is analyzed,and the design and fabrication of the mirror are also presented. The effects of some operating parameters such as bias voltage and current frequency on the membrane deformation are tested by experiment.

关 键 词：自适应光学 可变形反射镜 光驱动 光学特性 

分 类 号：TN249[电子电信—物理电子学]