流图法在光探测器芯片高频特性测量校准上的应用  

Application of "Flow-Graph" Technique in Measurement Calibration of High Frequency Characteristics of Photodetectors

作　　者：苗昂[1] 黄永清[1] 李轶群[1] 吴强[1] 黄辉[1] 任晓敏[1] 

机构地区：[1]北京邮电大学光通信与光波技术教育部重点实验室,北京100876

出　　处：《Journal of Semiconductors》2007年第3期448-452,共5页半导体学报（英文版）

基　　金：国家重点基础研究发展计划(批准号:2003CB314901);国家自然科学基金(批准号:60576018);教育部"新世纪人才支持计划"(批准号:NCET-05-0111)资助项目

摘　　要：在采用光调制法测量光探测器芯片高频响应特性的过程中,测试系统往往忽视光调制器响应、高频探针衰减以及端口间失配等误差中的一项或几项.为了降低校准不完善对结果造成的误差,文中提出了基于信号流图的系统校准分析方法,考虑了各种频响误差及端口间失配的影响,推导出校准公式.利用该法对一种光探测器的典型测试系统——基于LCA(lightwave component analyzer)的测试系统做了进一步校准分析,在130MHz^20GHz范围内,测量了一种新型光探测器的高频响应参数S21,结果表明经流图法校准的S21参数比仅使用原有校准算法有明显改善,证明了该方法的可行性.In order to reduce the inaccuracy of traditional calibration, the ＂flow-graph＂ method is proposed. This method takes into account the effects of the inaccuracy of various frequency responses and the mismatch between different ports. Furthermore,a calibration formula is deduced. This method was applied to the further calibration analysis of a typical lightwave component analyzer （LCA）-based photodetector measurement system. The experiment of a novel photodetector demonstrates that in the range of 130MHz to 20GHz,an obvious improvement in the calibration of the S21 parameter has been achieved compared to the traditional algorithm, and the proposed method is proved feasible.

关 键 词：光探测器 高频响应 校准 

分 类 号：TN36[电子电信—物理电子学]