纳米操作系统的研究现状与关键技术  

State-of-the-Art and Key Technologies of Nanomanipulation Systems

作　　者：王乐锋[1] 荣伟彬[1] 孙立宁[1] 

机构地区：[1]哈尔滨工业大学机器人研究所,黑龙江哈尔滨150001

出　　处：《制造技术与机床》2007年第3期54-57,共4页Manufacturing Technology & Machine Tool

摘　　要：纳米操作是用于研究纳米材料、结构和装置的性质特征的基本技术,也是纳米构筑单元准备、纳米设备装配的必备技术。目前典型的纳米操作系统有基于扫描探针显微镜的系统,基于电子显微镜的系统,基于光镊的系统及混合式系统。详细阐述了各类系统的特点和发展现状。分析了末端工具、显微成像、定位与驱动、操作策略等纳米操作系统中的关键技术,并对发展趋势进行了展望。Nano - manipulation is a fundamental technology for property characterization of nano - materials, structures and mechanisms. It is also necessary to the preparation of nano building blocks and to the assembly of nano - devices. Currently, there are mainly four kinds of typical nano - manipulation systems. The characterization and state - of - the - art of them are presented separately. The key technologies such as end -effectors, microscopes, positioning and actuators, mechanism and strategies in manipulation are analyzed. In the end, the development trends of nano- manipulation systems are discussed.

关 键 词：纳米操作 研究现状 关键技术 

分 类 号：TN16[电子电信—物理电子学]