HEPA/ULPA过滤器效率检测仪器相关问题的探讨  

The Discussion of Particle Detectors for HEPA/ULPA Filter Efficiency Testing

作　　者：刘志军[1] 朱能[1] 

机构地区：[1]天津大学环境科学与工程学院

出　　处：《洁净与空调技术》2007年第1期26-28,34,共4页Contamination Control & Air-Conditioning Technology

摘　　要：HEPA/ULPA效率测试中气溶胶浓度的准确检测至关重要。本文对光度计(火焰光度计)、光学粒子计数器和凝结核粒子计数器三类常用的高效空气过滤器效率检测仪器的工作原理、简单构成分别进行了介绍,重点分析了其各自的特点以及在实际应用中存在的问题,通过论述指出:随着洁净技术的发展,光学粒子计数器和凝结核粒子计数器将是主流的高效空气过滤器效率检测仪器。It is important to test the concentration of test aerosol accurately for HEPA/ULPA filter efficiency testing. This paper presents the principles and characteristics of three particle detectors （photometer, optical particle counter and condensation nucleus counter ） ,then, their existing problems in practice were analyzed in detail. Based on the discussion, it was concluded that optical particle counter and condensation nucleus counter will be the major particle detectors for HEPA/ULPA filter testing in the future.

关 键 词：光度计 光学粒子计数器 凝结核粒子计数器 

分 类 号：TM925.1[电气工程—电力电子与电力传动]