三氟化氮纯化方法综述  

Summary on Purification Methods for Nitrogen Trifluoride

作　　者：彭立培[1] 王少波[1] 李绍波[1] 付嫚[1] 

机构地区：[1]中国船舶重工集团公司第七一八研究所

出　　处：《舰船防化》2007年第1期38-43,共6页

摘　　要：介绍了三氟化氮（NF3）的基本物化性质及生产方法。为了满足电子工业对其纯度要求，采用的纯化方法有：低温精馏法、共沸精馏法、吸收法、选择吸附法以及各种方法的联用技术。This paper refers to the basic physical ＆ chemical property of nitrogen trfluoride as well as its production methods. In order to meet the need of semiconductor industry, applied purification methods for nitrogen trifluoride include as follows： cryogenic distillation, azeotropic distillation, absorption, selective adsorption and their combinations.

关 键 词：三氟化氮 纯化 精馏 吸收 吸附 

分 类 号：TQ028.1[化学工程]