溶胶-凝胶旋涂法制备ITO薄膜  

ITO Thin Films Prepared by the Sol-Gel Spin-Coating Method

作　　者：陈健[1] 张江[1] 高善民[1] 曲荣君[1] 

机构地区：[1]鲁东大学化学与材料科学学院,山东烟台264025

出　　处：《微纳电子技术》2007年第3期132-136,共5页Micronanoelectronic Technology

基　　金：中国博士后基金项目(2003034330);山东省自然科学基金项目(Y2005f11);鲁东大学中青年自然科学基金项目(21000301)

摘　　要：以InCl_3和SnCl_4·5H_2O为主要原料,采用溶胶-凝胶法和旋转涂膜工艺,在普通玻璃基片上制备掺锡氧化铟(ITO)纳米透明导电薄膜。应用X射线衍射(XRD)、扫描电子显微镜(SEM)对薄膜进行表征;研究了不同热处理温度、热处理时间及不同旋转速度对薄膜形态和结构的影响。结果表明,采用溶胶-凝胶旋涂法制备的ITO薄膜是由立方相纳米颗粒构成,随涂层增加,薄膜表面变得平滑。随热处理温度的提高或时间的延长,薄膜由非晶态逐渐转化为良好的晶态薄膜。Using InCl3 and SnC14·5H2O as raw materials, Indium tin oxide thin films were prepared by the sol-gel spin-coating process. The phase composition and morphology properties of ITO thin films were characterized by the techniques of X-ray diffraction （XRD） and scanning electron microscope （SEM） . The influence of the heat treated temperature, time and spin speed for the films structure and morphologies were studied. The results show that the ITO thin films are composite by cubic phase nanoparticles. Along with the coating numbers increase, the face became smoothness. The films gradate from noncrystalline to crystalline along with the increase of heat treatment temperature and time.

关 键 词：ITO薄膜 溶胶-凝胶法 制备 表征 

分 类 号：O484.4[理学—固体物理]