碳纳米管场发射显示器中栅极技术的研究  

Study on Triode Technology of Carbon Nanotube Field Emission Display

作　　者：狄云松[1] 王博 雷威[1] 张晓兵[1] 崔云康[1] 程静 

机构地区：[1]东南大学电子科学与工程学院 [2]解放军第63916部队 [3]华东电子集团

出　　处：《电子器件》2006年第4期1007-1009,1014,共4页Chinese Journal of Electron Devices

基　　金：国家973计划资助(2003CB314706;2003CB314702);教育部博士点基金(20030284003);新世纪优秀人才支持计划的支持

摘　　要：碳纳米管场发射显示器件的研究已在各个国家开展了许多年,但仍然有很多的问题亟待解决,如碳纳米管作为阴极发射材料的发射均匀性、开启电场、栅极结构的制作、荧光屏制作、真空封装等困难。本文研究了碳纳米管场发射器件的几种结构、特性及其制作工艺,重点阐述了前栅极结构碳纳米管场发射显示器件中在栅极制作和阴极材料装配的瓶颈,并提出了一种栅极制作和阴极保护的方法,并运用此方法在实验室制作了三极结构器件进行验证,有效地解决了制作前栅极结构的困难,为制作大面积碳纳米管场发射显示屏提供了可行性方案。Carbon Nanotube Field Emission Display（CNT-FED） has been researched for many years in certain countries, but there are still many problems to be solved, such as carbon nanotubes＇ emitting uniformity, turn-on field intensity, fabrication of triode structure, fabrication of phosphor layer, vacuum environment and so on. Based on our research work, we introduce some type of triode structures, their properties and fabrication methods; especially point out the dilemma between the fabrication of triode layer and cathode material layer, and put forward a new method to solve the question. The method to fabricate a prototype was used. It proves this method can solve the difficult in fabricating triode and cathode, and it promises the feasibility of large area CNT-FED.

关 键 词：碳纳米管 场发射 三极结构 栅极制作 

分 类 号：TN105.1[电子电信—物理电子学]