小深孔内径电容传感测量系统的研究  

Research of the Capacitance Measurement System for Inner Diameter of Deep Hole

作　　者：徐安桃[1] 付敬业[2] 郑义忠[3] 叶声华[3] 

机构地区：[1]天津大学,天津300072 [2]军事交通学院汽车系,天津300161 [3]天津大学测量技术与仪器国家重点实验室,天津300072

出　　处：《传感技术学报》2006年第6期2460-2463,共4页Chinese Journal of Sensors and Actuators

摘　　要：采用电容传感器测量小深孔的孔径,该系统使用直径较小的电容探针作为传感器件,电容仪器将孔径的变化转换为电压的变化,并通过USB接口将此电压信号输入到计算机系统中进行处理.论述了电容传感器的工作原理和电容仪器的转换电路的基本原理,设计了电容传感器测量小盲深孔孔径系统的总体方案,特别使用小于Φ3而大于Φ1深孔的内径自动检测,并对Φ3和7mm孔径进行了实际测量,并分析了测量所得到的数据,多次测量的标准差小于0.5μm,测量分辨率为0.05μm.A system, which use the capacitance sensor to measure the aperture of small blind holes, has been studied. A capacitance probe with small diameter is used as the sensor. The capacitance instrument converts the change of the aperture to the change of voltage signal which can be input into a computer through the USB interface to process. Working principle of the capacitance sensor and the electronic circuits of the capacitance instrument are discussed. The design scheme is also disserted as the system using the capacitance sensor to measure the aperture of small holes. The calibration of the sensor has been done on the small blind holes with Φ3 and 7 mm aperture. From the analyzed experiment data, the resolution is 0. 05 μm, and the standard deviation of the experiments is within 0. 5μm.

关 键 词：小深孔 电容传感器 传感器标定 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]