Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices  

作　　者：CHENG Dong-ming DUAN Zhi-yong MA Feng-ying GONG Qiao-xia 

机构地区：[1]School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, CHN

出　　处：《Semiconductor Photonics and Technology》2007年第1期25-32,共8页半导体光子学与技术（英文版）

摘　　要：The motor’s configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10 nm and a maximum velocity of 0.6 mm/s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm.The motor＇s configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10 nm and a maximum velocity of 0.6 mm/ s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm.

关 键 词：hybrid piezoelectric motors precision positioning devices micro-machining systems dynamic analysis 

分 类 号：TN402[电子电信—微电子学与固体电子学] TM3[电气工程—电机]