一种基于脉冲红外光源和折叠光路的微小型红外光谱仪  

Development of a Micro-Infrared Spectrometer Based on Pulse Infrared Light Source and Two-Double Light Route

作　　者：杜晓晴[1] 温志渝[1] 向贤毅[1] 龙再川[1] 刘海涛[1] 陈勤[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室重庆大学光电工程学院微系统研究中心,重庆400044

出　　处：《光谱学与光谱分析》2007年第3期619-622,共4页Spectroscopy and Spectral Analysis

基　　金：重庆市科技攻关重点项目(CSTC2006ab2006);科技部国际合作项目(2004DFA00600);重庆市科委创新能力建设项目(CSTC;2004CB4003);重庆市自然科学基金(CSTC2006BB2151)资助

摘　　要：设计了一种不同于传统光栅扫描型光谱仪的新型微小型红外光谱仪。该光谱仪采用灵敏度高且体积小巧的非致冷红外探测器LiTaO3，在光路上直接采用MEMS脉冲红外光源，从而去掉了传统机械斩波器，并通过折叠光路进一步减小光谱仪体积。初步结果显示，所设计的微小型红外光谱仪的方法是可行的，工作波段2000-5000m，光谱带宽45nm，可用来分析塑料薄膜、生物液体以及环境大气在内的样品。A novel micro infrared spectrometer was designed which is different from traditional grating scanning one. This micro spectrometer introduced an uncooled infrared detector LiTaO3 with high sensitivity and small volume, and a MEMS pulsed infrared light source was adopted as emitter and chopper, which threw off traditional mechanical chopper. Combined with the design of a two-double light route, the volume of micro spectrometer was made even smaller. Primary results show that the design method of micro-infrared spectrometer is feasible, the wavelength range of instrument is wide, from 2 000 to 5 000 nm, and spectrum bandwidth is about 45 nm, which can be used for the sample analysis, such as plastic films, biologic liquid, environmental gas and so on.

关 键 词：红外光谱仪 微系统 微电子机械加工 脉冲红外光源 折叠 

分 类 号：TH83[机械工程—仪器科学与技术]