脉冲偏压占空比对MgO薄膜成分及结构的影响  

Influences of duty cycle on the composition and structure of MgO thin films

作　　者：朱道云[1] 郑昌喜[1] 陈弟虎[1] 何振辉[1] 

机构地区：[1]中山大学物理科学与工程技术学院,广东广州510275

出　　处：《华中科技大学学报（自然科学版）》2007年第3期5-7,59,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家高技术研究发展计划资助项目(2003AA311122)

摘　　要：采用阴极真空电弧离子沉积技术在玻璃衬底上制备出了具有择优取向的透明MgO薄膜．利用卢瑟福背散射谱、X射线衍射仪、扫描电子显微镜及紫外-可见吸收光谱仪分别对MgO薄膜的成分、结构、表面形貌及可见光透过率进行了分析．结果表明：MgO薄膜具有（100）和（110）两种取向，且择优取向趋势不随占空比的变化而变化．随着占空比的增大，脉冲偏压为-150V时制备的MgO薄膜中Mg和O的原子含量之比逐渐增大，占空比为30％时，n（Mg）：n（O）接近1：1；SEM图表明，晶粒尺寸随着占空比的增大几乎没有发生明显的改变；在350～900nm范围内，MgO薄膜的可见光透过率可以达到90％以上．MgO thin films with preferred orientation and high optical transparence were prepared on the slide-glasses by cathodic vacuum arc ion deposition. Rutherford backscattering spectroscopy （RBS）, X-ray diffraction （XRD）, scanning electron microscopy （SEM） and UV-Visible Spectrophotometer were used to investigate the influences of duty cycle on the composition, the crystal structure and the morphology of MgO thin films, respectively. XRD patterns indicate that MgO thin films have a combined orientation of MgO （100） and （110） and the tendency of the preferred orientation is unchanged with the duty cycle. When the bias voltage is -150 V, the RBS spectra also show that the value of n（Mg）/n（O） increases with the increasing duty cycle and reaches nearly the stoichiometric composition of bulk MgO when the duty cycle is 30 %. It is seen that the grain size keeps almost unchanged with the increasing duty cycle in SEM images. The transparence of MgO thin film can be higher than 90 % in the visible light range.

关 键 词：阴极真空电弧离子沉积 占空比 MgO薄膜 等离子体显示板(PDP) 

分 类 号：TB43[一般工业技术]