台面结构硅基法珀型光纤MEMS压力传感器的研究  

The Study of the Optical Fiber MEMS Pressure Sensor with a Mesa Structure Diaphragm

作　　者：陈绪兴[1] 王鸣[1] 戎华[1] 倪小琦[1] 

机构地区：[1]南京师范大学物理科学与技术学院江苏省光电技术重点实验室,南京210097

出　　处：《传感技术学报》2007年第4期820-823,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金;江苏省高技术研究计划项目资助(BG2003024)

摘　　要：提出了一种新的光纤压力传感器的设计,该传感器敏感膜采用了台面结构而非传统的平面结构.用法布里-珀罗(Fabry-Perot)干涉理论阐述了传感器的工作原理,提出了敏感膜的力学模型.基于Fabry-Perot干涉理论推导出光纤MEMS压力传感器中台面敏感膜受到的压力与干涉光强的关系表达式,通过ANSYS有限元软件分析了台面膜型的力学性能,结果表明台面敏感膜在平行度上优于平面膜.通过数值模拟分析了传感器的关键参数对其性能的影响,为光纤MEMS压力传感器的加工和制作提供了理论依据.A novel pressure sensor with a mesa structure diaphragm is presented, which has a mesa structure diaphragm rather than the planar one. The operating principle of the MEMS pressure sensor is expati- ated by the Fabry-Perot （F-P） cavity model and the mechanical model of the sensor is explained. The relation expression between pressure and interference light intensity is deduced based on the theory of F-P interference. The mechanical model of the mesa structure diaphragm is validated through the ANSYS simulation, which declares that the mesa structure diaphragm is superior to the planar one on the depth of parallelism. It is investigated how the key parameters influence the sensor performance, which is prepared for the sequent process and fabrication for this optical fiber MEMS pressure sensor.

关 键 词：光电技术 台面结构 F-P干涉 数值模拟 平行度 关键参数 

分 类 号：TN491[电子电信—微电子学与固体电子学]