硅微型加速度传感器技术  

Silicon Micro-acceleration Sensor Technologies

作　　者：吴瑞[1] 温廷敦[1] 

机构地区：[1]中北大学微米纳米技术研究中心,山西太原030051

出　　处：《仪表技术与传感器》2007年第3期8-10,共3页Instrument Technique and Sensor

摘　　要：介绍了硅微加速度计的基本原理以及国内外最新发展的几种硅微加速度计的结构形式,包括压阻式、电容式、隧道式等,分析了这些传感器的基本特点,总结出它们在传感器性能方面存在的一些问题,提出了一些解决关键问题的措施,并对目前两种新的微机理:共振隧穿和介观压阻效应的原理和应用前景进行了论述。The basic principle of silicon micro-accelerometers is explained and several kinds of them with different strutures are investigated, including piezoresistance type, capacitive type, tunneling-etlect type, etc. The characteristics of these types are introduced. Some focused problems are pointed out,and several methods and advices are offered to improve the property of silicon micro-accelerometers. Furthermore, the principle and application prospect of the two kinds of new micro-mechanisms including resonant tunnel and meso-piezorresistance is also discussed.

关 键 词：加速度计 压阻 电容 隧道效应 共振隧穿 介观压阻效应 

分 类 号：TP112[自动化与计算机技术—控制理论与控制工程]