纳米多孔铝阳极氧化膜的形成机理研究  

Formation Mechanism of Nano-Porous Anodic Alumina Membranes

作　　者：朱绪飞[1] 宋晔[1] 肖迎红[1] 朱晴[1] 高魁[1] 陆路德[1] 

机构地区：[1]南京理工大学化工学院,南京210014

出　　处：《真空科学与技术学报》2007年第2期113-117,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金资助项目(No.50373019);南京理工大学科研发展基金(XKF05018)

摘　　要：为探讨多孔铝阳极氧化膜的形成机理,研究了不同气压条件下铝在磷酸溶液中的阳极氧化过程,发现在真空下进行阳极氧化,氧气析出非常明显。通过测定不同气压下的阳极氧化曲线,分析了致密膜向多孔氧化铝膜的转化和生长过程,结果显示氧气析出是导致氧化膜从致密膜向多孔膜转变的主要原因。提出了在氧化膜/电解液界面上氧气分子的聚集是造成表面条纹的新观点。通过氧化膜断面的SEM形貌表征,首次发现多孔膜的主孔道中存在分孔道。分孔道的产生说明析氧反应不但在致密膜/电解液界面发生,而且在多孔膜孔壁/电解液界面也同时发生。Anodization of high purity Al foil in phosphoric acid solution at different pressures was experimentally studied to understand the formation mechanism of the nano-porous anodic alumina membranes. The microstructures of the membrane were characterized with scanning electron microscopy（SEM）. For the membrane anodized in vacuum, we clearly observed fairly large amount of evolved oxygen and some pores with smaller branch pores. Oxygen usually evolves at the interfaces of electrolyte and the At oxide layer or inner walls of pores. The oxidation curve and SEM images show that the oxygen evolution at the interface plays a key role in the transition from the compact At oxide layer to the porous membrane.

关 键 词：阳极氧化 多孔铝阳极氧化膜 真空 氧气析出 电解液 

分 类 号：O646.6[理学—物理化学]