Ultra-precision machining of reflector array for laser diode beam shaping  

作　　者：FANG F. Z. XIONG Z. HU X. T. 

机构地区：[1]State Key Laboratory of Precision Measuring Technology ＆ Instruments, Tianjin University, Tianjin 300072, Chin [2]Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, 638075, Singapore

出　　处：《Optoelectronics Letters》2007年第2期141-143,共3页光电子快报（英文版）

摘　　要：Ultra-precision machining is an effective approach to achieve high dimension accuracy and surface finish required in optical and laser components. An extensive study using a two-axis diamond turning machine is conducted to machine the reflector arrays used for laser diode beam shaping. To position the workpiece precisely, theoretical analysis is made so that the dimensional accuracy can be achieved. Investigations into machining burr reduction are carried out. With the process developed, reflectors with optical surface finish of 8 nm in Ra and minimized burr size of less than 0.5 μm have been achieved.

关 键 词：激光二极管射束成形 反射镜阵列 超精密机械加工 表面光洁度 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TN249[电子电信—物理电子学]