液流悬浮超光滑纳米加工试验  

Experimental Research on Hydrodynamic Suspension Polishing for Nano-scale Ultra-smooth Surface

作　　者：曹志强[1] 赵继[1] 詹建明[1] 张富[1] 

机构地区：[1]吉林大学机械科学与工程学院

出　　处：《农业机械学报》2007年第3期153-155,共3页Transactions of the Chinese Society for Agricultural Machinery

基　　金：国家自然科学基金资助项目(项目编号:50175049)

摘　　要：建立了超光滑表面加工的液流悬浮加工系统,并简述了液流悬浮超光滑加工系统及其工作原理。试验实现了光学材料k9玻璃的亚微米去除,并在其表面上获得了纳米级的超光滑表面。试验结果表明,采用液流悬浮加工技术对光学材料进行超光滑加工是一种有效方法。A hydrodynamic suspension ultra-smooth machining system based on NC machine tool was constructed. The structure and the operating process of the hydrodynamic suspension ultra- smooth machining system were introduced. The submicroscopic cutting of work pieces conducted for surfaces of k9 optical glass, on which ultra-smooth surfaces were realized. The mechanism of hydrodynamic suspension ultra-smooth machining was analyzed. The experimental results show that the hydrodynamic suspension machining technique is available for ultra-smooth machining of optical materials.

关 键 词：超光滑加工 液流悬浮 亚微米去除 

分 类 号：TG669[金属学及工艺—金属切削加工及机床]