基于激光热应力法的薄膜蠕变性能评估方法  

Evaluation of Creep Deformation Property by the Laser Thermal Stress Method

作　　者：李粤[1] 张永康[2] 

机构地区：[1]华南热带农业大学机电与信息工程学院 [2]江苏大学机械工程学院

出　　处：《农业机械学报》2007年第3期156-159,147,共5页Transactions of the Chinese Society for Agricultural Machinery

基　　金：华南热带农业大学科技基金资助项目(项目编号:Rnd0624)

摘　　要：采用单脉冲激光在薄膜表面进行局部加载,对薄膜在受热区域、冷热接合部及与基体连接界面产生的热应力、热应变及应力松弛进行理论分析,研究薄膜的蠕变机制和非弹性变形的热力学响应。分析结果表明,薄膜受高温及冷却退火作用都会产生应力松弛;冷却退火还会形成拉应力,薄膜裂纹由拉应力过大引起,薄膜的蠕变性能是薄膜断裂前的热力学行为,由应力的性质和大小决定,用激光热应力法可以实现对薄膜性能的评估。Single pulsed laser was used to shock the local surface of a film, the thermal stress, thermal strain and stress relaxation produced in the heated area, cooling and heating connection, as well as the bond interface of the film-substrate interface were theoretically analyzed and the thermodynamic response of creep deformation mechanisms and non-elastic deformation were studied. The results indicate that the film will produce stress relaxation under high temperature and cooling annealing, a tensile stress will also be produced by cooling annealing, the film crack is caused by the oversize of tensile stress, the creep characteristics of film is one of the film fracture thermodynamic response, which is lied in the property and size of stress, and the evaluation of film property will be accomplished by using the method of laser thermal stress.

关 键 词：薄膜 蠕变 裂纹 应力 

分 类 号：TG14[一般工业技术—材料科学与工程]