Cr在多弧离子镀(Ti,Cr)N复合膜中的作用  

Effect of Cr element on properties of (Ti,Cr)N composite films prepared by multi-arc ion coating

作　　者：张鑫[1] 邱万奇[1] 史新伟[1] 李春明[1] 

机构地区：[1]华南理工大学机械工程学院,广东广州510640

出　　处：《真空》2007年第2期48-50,共3页Vacuum

基　　金：广东省自然科学基金资助项目;批准号:04020096。

摘　　要：利用AIP-01多弧离子镀膜机,通过改变铬靶电流,在高速钢基体上沉积出不同Cr含量的(Ti,Cr)N复合膜涂层,用扫描电子显微镜、微纳米力学测试仪和X射线对薄膜的表面颗粒、硬度及内应力进行了分析。结果表明薄膜中添加Cr能减小表面颗粒尺寸,提高硬度,当Cr的含量达到31%(wt%)时,薄膜硬度达到最高值,此时薄膜的内应力也最大。The （Ti,Cr）N films which has different content of Cr were deposited on high-speed steel substrate by changing current of Cr target on AlP-01 coater. The surface morphology, hardness and internal stress of （Ti,Cr）N films were analysed by using SEM, micro-nano indentation testing and X ray diffraction. The results showed that the hardness of （Ti,Cr）N films increases with increasing content of Cr. When the conten＇t of Cr is 31% （wt % ）, the hardness and innernal stress of films both reach the maximum. The micro-droplet size on （Ti,Cr）N film surface is smaller than that of TiN.

关 键 词：电弧离子镀 CR TIN 

分 类 号：TB3[一般工业技术—材料科学与工程] TB43