计算机在真空排气中的应用研究  

Computer application in control of vacuum exhausting process

作　　者：米伦[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《真空》2007年第2期59-61,共3页Vacuum

摘　　要：采用计算机对真空排气工艺过程进行实时控制,执行排气工艺规程。用计算机控制技术细化工艺控制量,优化工艺过程,提高了工艺的一致性、稳定性和产品质量;程控系统设计合理,操作简便,抗干扰能力强。Taking the vacuum degree as criterion, the real-time control of vacuum exhausting process was designed and carried out by a computer in accordance to the technological procedure. It was proved that the computer control system can offer the quantative control in detail to optimize the technological process and improve the consistency and stability of both the pro- cess and quality of products. The control system was also proved reasonable in design and simple in operation with high antijamming ability.

关 键 词：计算机 程控排气 真空度 抗干扰 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置] TN108[自动化与计算机技术—控制科学与工程]