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作 者:曹鸿[1] 吴永刚[1] 张莉[1] 焦宏飞[1] 付联效[1] 彭东功[1] 郑秀萍[1]
机构地区:[1]同济大学精密光学工程技术研究所,上海200092
出 处:《强激光与粒子束》2007年第3期421-424,共4页High Power Laser and Particle Beams
基 金:国家自然科学基金委-中国工程物理研究院联合资助课题(10576021)
摘 要:利用真空热蒸发的方法制备了厚度为0.28~0.40μm的硬脂酸钠薄膜,并用光学显微镜和傅里叶红外光谱仪对硬脂酸钠薄膜进行了观察和分析,发现硬脂酸钠薄膜的红外光谱和固体的光谱具有相似性。在空气环境中硬脂酸钠薄膜不易潮解,在选择的无水脱膜溶液中,容易脱出无明显针孔的自支撑Al膜。用俄歇电子能谱测试,未发现脱出的Al膜上有残留的硬脂酸钠脱膜剂。Sodium stearate film of 0.28~0.40μm thick was made by vacuum thermal evaporation. Sodium stearate film was investigated by Fourier transform IR spectroscopy. Results indicate that sodium stearate film and sodium stearate have similar properties. Research results also indicate that sodium stearate film was not easy to deliquesce in atmospherical condition, but it deliquesce easily in a solution without water. Self -standing Al filters made by PVD were tested by optical microscopy. Their surfaces have no obvious pinholes. The elements in Al filters were analyzed using Auger Electron Spectroscopy. Results indicate that there is no residua of remover in Al filters.
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