Bimorph结构微热执行器的节点分析方法  

Nodal analysis method for Bimorph thermal microactuator

作　　者：黎仁刚[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《仪器仪表学报》2007年第4期728-733,共6页Chinese Journal of Scientific Instrument

摘　　要：MEMS系统设计的节点分析法已成功应用于机电耦合器件的仿真,且已表明是一种简单实用的方法。本文在已有静态模型的基础上,通过对传热行为的分解以及引入等效质量,建立了Bimorph结构热执行器的动态节点模型。同时选取在电子行业得到普遍应用的电路仿真软件SPICE作为模型仿真平台,并将建立的节点分析模型应用于电路仿真平台。此模型数值实验证明,此方法和有限元分析软件ANSYS的仿真结果吻合较好,而且计算效率高,可在实际器件设计中作为参考。The nodal analysis method has been applied widely to coupled electro-mechanical devices and proved to be a simple and practical method. This paper introduces a new model to expand the applied field. By the decomposition of the heat transfer behavior and the calculation of the equivalent mass, this paper presents the dynamic nodal model of the Bimorph thermal actuator and uses the commonly used circuit simulation software, SPICE as the simulation platform of the model. Numerical simulation results prove that this model agrees well with the simulation result using FEA software, ANSYS. This method could be utilized in the practical design of bimorph thermal actuator because its computing effectiveness is much higher than that of traditional FE method.

关 键 词：Bimorph结构电热微执行器 节点分析法 等效质量 

分 类 号：TN402[电子电信—微电子学与固体电子学]