角度定量化估算软光刻PDMS印章的平面变形扭曲  

Angular Quantification for Evaluating Planar Distortions of PDMS Stamps in Soft Lithography

作　　者：蒋欢妹[1] 贺全国[1] 

机构地区：[1]湖南工业大学绿色包装与生物纳米技术应用实验室,湖南株洲412008

出　　处：《微纳电子技术》2007年第4期200-205,216,共7页Micronanoelectronic Technology

基　　金：国家自然基金青年基金(205050202006-2008);中国包装总公司科研项目(04ZBKJA0042005-2006);湖南省教育厅资助科研项目(05C5082005-2006);湖南省普通高校青年骨干教师资助计划(2005-2008)

摘　　要：引进与平面图案变形扭曲大小相称的角度参数θ,提出了一种对软光刻技术中PDMS印章的角度平面扭曲进行定量评价的方法。聚二甲基硅氧烷(PDMS)平面印章的单个图案的平均扭曲角(绝对扭曲角θ1)和相邻图案间的扭曲角(相对扭曲角θ2)由角度参数θ的差值(θ)决定。经四种不同粘附固定处理的PDMS印章中进行角度定量估算比较,发现采用硅烷修饰的玻璃板基板制备的PDMS印章显示很强的粘附性和最小的平面变形扭曲,其绝对扭曲角度θ1为3.98×10-3,相对扭曲角θ2为1.22×10-3。研究结果表明,角度定量化估算可实现软光刻中图案平面变形扭曲的定量评价和比较,并通用于弹性印章基板筛分选择。An angular quantification method of planar distortion for PDMS stamps in soft lithography was proposed by introducing angular parameter θ that was proportional to patterns planar distortion in magnitude. The average planar distortion （absolute distortion θ1） and pattern-to-pattern distortion （relative distortion θ2） of individual pattern of PDMS stamps were determined by angular discrepancies （θ）. The angular quantification was evaluated among four different PDMS stamps affixation treatments, and the PDMS stamps supported on silane-modified glass showed strong binding and minimal planar distortion. The absolute angular distortion θ1 was 3.98×10^-3 and the relative angular distortion 02 was 1.22×10^-3. The angular evaluations demonstrate a versatile method for quantifying and comparing planar distortions among patterns as well as for screening elastomer stamps supports in soft lithography.

关 键 词：扭曲 PDMS印章 角度量化 硅烷修饰玻璃 软光刻技术 

分 类 号：TQ264.14[化学工程—有机化工] TN305.7[电子电信—物理电子学]