金属-类金刚石薄膜研究进展  

Research progress on metal-DLC films

作　　者：谷坤明[1] 汤皎宁[1] 李均钦[1] 杨钦鹏[1] 

机构地区：[1]深圳大学材料学院

出　　处：《深圳大学学报（理工版）》2007年第2期159-165,共7页Journal of Shenzhen University(Science and Engineering)

基　　金：广东省自然科学基金资助项目(021286)

摘　　要：类金刚石膜中的金属粒子可缓解类金刚石薄膜中由于制备态产生大内应力而导致的膜厚受限这一矛盾,能显著改变薄膜各种性能.述评了金属-类金刚石薄膜的制备工艺、不同金属粒子对DLC薄膜形态、键结构、力学及摩擦磨损性能、物理化学性能等的影响,指出在金属粒子对DLC膜的力学及摩擦学性能的影响方面还有很多待确定的因素.Diamond like carbon which limits the thickness of the （DLC） films suffer their large intrinsic films and their application. Metal-DLC stress resulted from the fabrication process, film is an effective way to reduce the stress and improve the mechanical properties of DLC films. In this paper, the febrication of Metal-doped DLC films with different metal and the influence of the metals on the properties of DLC films, such as micromorphology, bond structure, mechanical, tribological, physical, chemical properties, were reviewed in details. It is pointed out that the influence of metal on the mechanical properties is not quite certain yet.

关 键 词：DLC膜 含金属碳膜 Me—DLC 薄膜改性 薄膜应力缓解 

分 类 号：O751[理学—晶体学] TB332[一般工业技术—材料科学与工程]