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机构地区:[1]同济大学材料科学与工程学院,上海200092 [2]南阳鸭河口发电有限责任公司,南阳473000
出 处:《同济大学学报(自然科学版)》2007年第4期519-521,536,共4页Journal of Tongji University:Natural Science
摘 要:采用热压工艺制备-系列CoAlO的靶材,在Gatan682型PECS+RIBE系统上,于25℃下Ar气氛中沉积到Si(100)衬底基片上,得到颗粒膜.测量了电阻和磁电阻性质,用透射电子显微镜测量样品的面内晶粒尺寸CoAlO薄膜的化学组成,用x射线光电子能谱仪测量.研究了化学组成对CoAlO颗粒膜隧道磁电阻效应的影响.结果表明,得到的颗粒膜是由2~3nm的C0氧化物分布在AlOx母相中,在室温下可显示磁性,通过ALOx阻挡层具有比较大的隧道磁电阻效应(达-6%);随温度升高,化学组成对隧道磁电阻影响更大.A series of CoAlO target were prepared by hot pressing techniques. CoAlO granular films were deposited on Si(100)by Gatan Model 682 PECS + RIBE System in Ar at 25℃. Rresistive and magnetoresistive properties were measured at room temperature. Transmission electron microscopy and X-ray photoelectron spectroscopy are also utilized to investigate the inter-grain distance and chemical states of these samples. Effects of chemical composition on tuneling magnetoresistance were studied. Based on the results,the particles of Co oxide with radius around 2-3 nm could be magnetic at room temperature and provide a large tunneling magnetoresistance of - 6 % through the AlOx barrier. Chemical composition at elevated temperatures greatly affect the tunnel magnetoresistive properties.
关 键 词:隧道磁电阻效应 渤协682型PECS+RIBE系统 化学组成
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