稀土元素修饰双层薄膜的气敏特性  

Gas-Sensitive Properties of Double-Layer Thin Films Modified by Rare Earth Elements

作　　者：管玉国[1] 戴国瑞[1] 南金[1] 

机构地区：[1]吉林大学电子工程系,长春130023

出　　处：《吉林大学自然科学学报》1997年第1期51-54,共4页Acta Scientiarum Naturalium Universitatis Jilinensis

摘　　要：采用PECVD方法制备Fe2O3／SnO2双层气敏薄膜，利用浸渍方法对稀土元素（La，Nd，Sm，Er，Yb）与铝配制的乳浊液进行表面修饰．测试结果表明，修饰后的双层薄膜对乙醇或丙酮具有较高的灵敏度与选择性。Fe2O3-SnO2 double-layer thin films were prepared by means of plasma enhanced chemicalvapour deposition method. The films were modified by being soaked in an ernulsive solution containingaluminium and rare earth elements (La, Nd, Sm, Er, Yb). The experimental results indicated thatthe modified thin films exibited a hlgh sensitivity and selectivity of to alcohol gas and acetone gas.

关 键 词：双层薄膜 气敏特性 稀土 二氧化锡 三氧化二铁 

分 类 号：TN304.21[电子电信—物理电子学]