用于多组分微图形制备的级联缩微方法及影响因素研究  

Fabrication of multi-component micropatterns at micron scale by serial contraction and adsorption nanolithography

作　　者：李海[1] 武海萍[1] 黄一波[1] 张晓东[2] 欧阳振乾[2] 张益[1] 胡钧[1] 

机构地区：[1]中国科学院上海应用物理研究所 [2]上海交通大学生命科学技术学院纳米生物学实验室,上海200030

出　　处：《电子显微学报》2007年第2期130-137,共8页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.10335070;No.10674147);上海市科委创新团队项目和纳米专项资助(No.03DZ14025)~~

摘　　要：固体材料表面图案化微结构的制备是实现其功能化的一条重要途径,也是当前的一个研究热点。本文介绍了一种具有较高保真度和精度的制备多组分微米图形的新方法——级联缩微方法(serial contraction and adsorption nanolithography,SCAN)。展示了利用一维SCAN方法制备的彩色墨水的微米级线条图形(线宽约1μm和4μm)、用二维SCAN方法制备的彩色墨水的微米级点阵(直径为30μm)以及多色文字的微图形。采用光学显微镜成像和原子力显微镜成像两种手段研究和讨论了影响级联微缩的因素,探讨了该方法的限度和潜在的应用前景。Fabriaction of patterns in the micron or nanometer scale has attracted much attention in recent years for its widely applications in micro-and nanoscienee. In this paper, with several examples, we demonstrated the principle of a novel method-serial contraction and adsorption nanolithography （SCAN）, by which, the original patterns composed of multi-components in millimeter scale can be shrunk to patterns in the micron scale. Two-components colorful ink lines, ink array and Chinese words were fabricated in micron scale by 1-D SCAN method or 2-D SCAN method, respectively. The images were obtained and analyzed by optical microscope. The root mean square （RMS） roughness of latex surface were measured by atomic force microscope. The main factors which influenced the SCAN were discussed.

关 键 词：微图形 级联缩微 制备方法 多组分 

分 类 号：TB302[一般工业技术—材料科学与工程]