钽酸锂薄膜材料及其热释电红外传感器应用研究进展  

Developments of LiTaO_3 Thin Film Material and Its Applications in Pyroelectric Infrared Sensors

作　　者：张德银[1] 黄大贵[1] 李金华[2] 董政[1] 陈敏[1] 

机构地区：[1]电子科技大学机电工程学院 [2]江苏工业学院功能材料实验室,常州213016

出　　处：《材料导报》2007年第3期10-12,20,共4页Materials Reports

基　　金：国家自然科学基金项目(60572007);中国民航飞行学院科研基金资助

摘　　要：介绍了钽酸锂薄膜材料及其热释电红外传感器应用研究概况;简要阐述了热释电红外传感器的工作原理;着重分析了钽酸锂薄膜材料的新制备技术,以及在热释电红外传感器应用方面的研究现状;指出了钽酸锂薄膜材料及其热释电红外传感器应用研究发展前景。The LiTaO3 thin film material and its applications in pyroelectric infrared sensors are presented in this paper. The working principle of pyroelectric infrared sensors is also introduced briefly. The recent researches of the new preparation technologies of the LiTaO3 thin film and its applications in pyroelectric infrared sensors are summarized in detail. The development prospects of the LiTaO3 thin film and the pyroelectric infrared sensors are pointed out together.

关 键 词：钽酸锂薄膜 制备技术 热释电红外传感器 应用 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]