CdTe薄膜太阳电池的硝酸-磷酸腐蚀及应用  

Investigation of nitric-phosphoric acid etching of CdTe solar cells and its applications

作　　者：李卫[1] 冯良桓[1] 武莉莉[1] 蔡亚平[1] 郑家贵[1] 蔡伟[1] 张静全[1] 黎兵[1] 雷智[1] 郝瑞英[1] 

机构地区：[1]四川大学材料科学与工程学院,成都610064

出　　处：《四川大学学报（自然科学版）》2007年第2期395-398,共4页Journal of Sichuan University(Natural Science Edition)

基　　金：国家高技术研究与发展计划(2003AA513010);四川省科技攻关项目(05GG021-003-3);辐射物理及技术教育部重点实验室(四川大学)(K2005-10)

摘　　要：采用硝酸-磷酸腐蚀CdTe薄膜,研究了硝酸-磷酸腐蚀速率、浓度、时间对薄膜的结构、形貌、组分的影响,获得腐蚀的最佳工艺条件.在腐蚀后,沉积了缓冲层材料和(或)金属背电极,研究了腐蚀后背接触的形成及碲对CdTe太阳电池的影响.结果表明,腐蚀后生成的碲有助于产生p+层,实现CdTe与金属背电极的欧姆接触.The CdTe thin films were etched with nitric-phosphoric acid and the effects of etching rates, concentrations and time on the properties of structure, morphology, composition of CdTe thin films were studied. And then etching processes and technologies for CdTe thin films were obtained. After etching, the buffer layers and （or） metal back electrodes were deposited. And the formation of back contacts and the effect of a Te layer on the performance of CdTe solar cells were investigated. The results indicate that the conductive Te formed using NP etching is helpful to produce a p^＋ layer and realize ohmic contacts to CdTe thin films.

关 键 词：腐蚀 背接触 CDTE薄膜 

分 类 号：TK514[动力工程及工程热物理—热能工程]